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Micro and Nano Fabrication - Tools and Processes (Paperback, Softcover reprint of the original 1st ed. 2015): Hans H. Gatzen,... Micro and Nano Fabrication - Tools and Processes (Paperback, Softcover reprint of the original 1st ed. 2015)
Hans H. Gatzen, Volker Saile, Jürg Leuthold
R2,843 Discovery Miles 28 430
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Ships in 10 - 15 working days

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.): Hans H. Gatzen, Volker Saile, Jurg Leuthold Micro and Nano Fabrication - Tools and Processes (Hardcover, 2015 ed.)
Hans H. Gatzen, Volker Saile, Jurg Leuthold
R5,364 Discovery Miles 53 640
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Ships in 10 - 15 working days

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i.e., wafer planarization and bonding, as well as contamination control.

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